Gas Quality Measurement
Source: VG Gas Analysis
The APIX line of tools provides on-line analysis of UHP gases for gas manufacturers, semiconductor fabrication, and
VG Gas Analysisne of tools provides on-line analysis of UHP gases for gas manufacturers, semiconductor fabrication, and research institutes. The fully programmable instruments use atmospheric pressure ionization mass spectrometry (API-MS) for continuous quality measurement (CQM). Ultrapure gases such as argon, nitrogen, and hydrogen, can be measured at the point of source supply or after clean up. This allows continuous measurement of contaminants such as water and oxygen to PPT levels. Change Gas Switching Times are held to <1ppb for 1 hour and <100ppt for 4 hours.
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