Product/Service

Thin Film Process Gas Monitoring

Source: VG Gas Analysis

Thin Film Process Gas Monitoring
The Ultratrace IQ is designed as a complete bolt-on in situ process monitoring system for thin
VG Gas Analysisace IQ is designed as a complete bolt-on in situ process monitoring system for thin film process gas monitoring. It can be configured for PVD, CVD and etch process tools. Designed as a mobile or fixed station system, it operates single or multiple chamber analysis. The system is equipped with a software package designed for use by the process operator, maintenance engineer, and process engineer. Key features include: automatic operation, self-adjusting electronics, and optional PC, and a simple user interface.

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